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Large-area achromatic interferometric lithography for 100 nm period gratings and grids

Journal of Vacuum Science \amp Technology B: Microelectronics and Nanometer Structures, Volume 14, Issue 6, November 1996, pp.4167-4170, Vol. 14 (November 1996), pp. 4167-4170.

by T. A. Savas, M. L. Schattenburg, J. M. Carter, H. I. Smith

posted to achromatic fabrication grids large-field lithography photolithography submicron by rodney on 2007-09-05 00:04:27 as

along with 1 group Kopelman_Group

Achromatic interferometric lithography for 100-nm-period gratings and grids

Journal of Vacuum Science \amp Technology B: Microelectronics and Nanometer Structures, Volume 13, Issue 6, November 1995, pp.2732-2735, Vol. 13 (November 1995), pp. 2732-2735.

by T. A. Savas, S. N. Shah, M. L. Schattenburg, J. M. Carter, H. I. Smith

posted to achromatic grids lithography photolithography submicron holographic by rodney on 2007-09-04 23:56:25 as

along with 1 group Kopelman_Group

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