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rodney's Schattenburg [4 articles]

Recent papers posted to rodney's library by the author Schattenburg. You can also see everyone's Schattenburg.
  • Large-area achromatic interferometric lithography for 100 nm period gratings and grids
    Journal of Vacuum Science \amp Technology B: Microelectronics and Nanometer Structures, Volume 14, Issue 6, November 1996, pp.4167-4170, Vol. 14 (November 1996), pp. 4167-4170.
    by TA Savas, ML Schattenburg, JM Carter, HI Smith
  • Optically matched trilevel resist process for nanostructure fabrication
    Journal of Vacuum Science \amp Technology B: Microelectronics and Nanometer Structures, Volume 13, Issue 6, November 1995, pp.3007-3011, Vol. 13 (November 1995), pp. 3007-3011.
  • Achromatic interferometric lithography for 100-nm-period gratings and grids
    Journal of Vacuum Science \amp Technology B: Microelectronics and Nanometer Structures, Volume 13, Issue 6, November 1995, pp.2732-2735, Vol. 13 (November 1995), pp. 2732-2735.
    by TA Savas, SN Shah, ML Schattenburg, JM Carter, HI Smith
  • Extreme-ultraviolet polarization and filtering with gold transmission gratings
    Appl. Opt., Vol. 34 (February 1995), pp. 648-654.
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