Quantum Yields of Photoacid Generation in 193-nm Chemically Amplified Resists by Fluorescence Imaging Spectroscopy Export

@article{citeulike:4061600, abstract = {doi: 10.1021/cm049448f A fast, convenient fluorescence imaging technique has been developed for evaluating the acid generation efficiency of photoacids in chemically amplified photoresists. The spectroscopic content of each feature in the dose ramp is determined and the resulting data are analyzed using a two-level optical titration model.}, author = {Ray, Krishanu and Mason, Michael D. and Grober, Robert D. and Pohlers, Gerd and Staford, Carolyne and Cameron, James F.}, citeulike-article-id = {4061600}, citeulike-linkout-0 = {http://dx.doi.org/10.1021/cm049448f}, citeulike-linkout-1 = {http://pubs.acs.org/doi/abs/10.1021/cm049448f}, day = {1}, doi = {10.1021/cm049448f}, journal = {Chemistry of Materials}, keywords = {lithography, ph, polymers}, month = {December}, number = {26}, pages = {5726--5730}, posted-at = {2009-02-16 23:52:12}, priority = {2}, title = {Quantum Yields of Photoacid Generation in 193-nm Chemically Amplified Resists by Fluorescence Imaging Spectroscopy}, url = {http://dx.doi.org/10.1021/cm049448f}, volume = {16}, year = {2004} }

TY - JOUR ID - citeulike:4061600 L3 - citeulike-article-id:4061600 N2 - doi: 10.1021/cm049448f A fast, convenient fluorescence imaging technique has been developed for evaluating the acid generation efficiency of photoacids in chemically amplified photoresists. The spectroscopic content of each feature in the dose ramp is determined and the resulting data are analyzed using a two-level optical titration model. IS - 26 JF - Chemistry of Materials EP - 5730 TI - Quantum Yields of Photoacid Generation in 193-nm Chemically Amplified Resists by Fluorescence Imaging Spectroscopy VL - 16 SP - 5726 KW - lithography KW - ph KW - polymers AU - Ray, Krishanu AU - Mason, Michael AU - Grober, Robert AU - Pohlers, Gerd AU - Staford, Carolyne AU - Cameron, James PY - 2004/12/01/ UR - http://dx.doi.org/10.1021/cm049448f ER -