Thermally actuated untethered impact-driven locomotive microdevices

by: OJ Sul, MR Falvo, RM Taylor, Ii, S Washburn, R Superfine

Applied Physics Letters, Vol. 89, No. 20. (2006)

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Abstract

The authors have developed steerable locomotive devices as small as 30 µm using the inertial impact drive as the thrust method. The devices consist of three-legged, thin-metal-film bimorphs designed to rest on three sharp tips with the device body curved up off the surface. Rapid, thermally induced curvature of one leg leads to stepwise translation on a low friction surface. A focused laser was used to supply energy and its parameters controlled the velocity and direction of motion of the device. ©2006 American Institute of Physics

@article{citeulike:1237411, abstract = {The authors have developed steerable locomotive devices as small as 30\ \ \µm using the inertial impact drive as the thrust method. The devices consist of three-legged, thin-metal-film bimorphs designed to rest on three sharp tips with the device body curved up off the surface. Rapid, thermally induced curvature of one leg leads to stepwise translation on a low friction surface. A focused laser was used to supply energy and its parameters controlled the velocity and direction of motion of the device. \©2006 American Institute of Physics}, author = {Sul, O. J. and Falvo, M. R. and Taylor, R. M. and Ii and Washburn, S. and Superfine, R. }, citeulike-article-id = {1237411}, doi = {http://dx.doi.org/10.1063/1.2388135}, journal = {Applied Physics Letters}, keywords = {actuation, mems, thermal}, number = {20}, posted-at = {2007-04-19 19:07:45}, priority = {4}, publisher = {AIP}, title = {Thermally actuated untethered impact-driven locomotive microdevices}, url = {http://dx.doi.org/10.1063/1.2388135}, volume = {89}, year = {2006} }

RIS record

TY - JOUR ID - citeulike:1237411 L3 - citeulike-article-id:1237411 TI - Thermally actuated untethered impact-driven locomotive microdevices JF - Applied Physics Letters VL - 89 IS - 20 PB - AIP N2 - The authors have developed steerable locomotive devices as small as 30  µm using the inertial impact drive as the thrust method. The devices consist of three-legged, thin-metal-film bimorphs designed to rest on three sharp tips with the device body curved up off the surface. Rapid, thermally induced curvature of one leg leads to stepwise translation on a low friction surface. A focused laser was used to supply energy and its parameters controlled the velocity and direction of motion of the device. ©2006 American Institute of Physics KW - actuation KW - mems KW - thermal AU - Sul, OJ AU - Falvo, MR AU - Taylor, RM AU - Ii AU - Washburn, S AU - Superfine, R PY - 2006/// UR - http://dx.doi.org/10.1063/1.2388135 ER -

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