Development of a femtosecond micromachining workstation by use of spectral interferometry.

by: S Bera, AJ Sabbah, CG Durfee, JA Squier

Opt Lett, Vol. 30, No. 4. (15 February 2005), pp. 373-375.

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Abstract

A workstation that permits real-time measurement of ablation depth while micromachining with femtosecond laser pulses is demonstrated. This method incorporates the unamplified pulse train that is available in a chirped-pulse amplification system as the probe in an arrangement that uses spectral interferometry to measure the ablation depth while cutting with the amplified pulse in thin metal films.

@article{citeulike:1997233, abstract = {A workstation that permits real-time measurement of ablation depth while micromachining with femtosecond laser pulses is demonstrated. This method incorporates the unamplified pulse train that is available in a chirped-pulse amplification system as the probe in an arrangement that uses spectral interferometry to measure the ablation depth while cutting with the amplified pulse in thin metal films.}, address = {Department of Physics, Colorado School of Mines, Golden, Colorado 80401, USA. sbera@mines.edu}, author = {Bera, S. and Sabbah, A. J. and Durfee, C. G. and Squier, J. A. }, citeulike-article-id = {1997233}, issn = {0146-9592}, journal = {Opt Lett}, keywords = {interaction, interferometry, laser, matter, micromachining, spectral, ultrafast}, month = {February}, number = {4}, pages = {373--375}, posted-at = {2007-11-27 22:12:40}, priority = {3}, title = {Development of a femtosecond micromachining workstation by use of spectral interferometry.}, url = {http://view.ncbi.nlm.nih.gov/pubmed/15762432}, volume = {30}, year = {2005} }

RIS record

TY - JOUR ID - citeulike:1997233 L3 - citeulike-article-id:1997233 TI - Development of a femtosecond micromachining workstation by use of spectral interferometry. JF - Opt Lett VL - 30 IS - 4 SP - 373 EP - 375 AD - Department of Physics, Colorado School of Mines, Golden, Colorado 80401, USA. sbera@mines.edu SN - 0146-9592 N2 - A workstation that permits real-time measurement of ablation depth while micromachining with femtosecond laser pulses is demonstrated. This method incorporates the unamplified pulse train that is available in a chirped-pulse amplification system as the probe in an arrangement that uses spectral interferometry to measure the ablation depth while cutting with the amplified pulse in thin metal films. KW - interaction KW - interferometry KW - laser KW - matter KW - micromachining KW - spectral KW - ultrafast AU - Bera, S AU - Sabbah, AJ AU - Durfee, CG AU - Squier, JA PY - 2005/02/15/ UR - http://view.ncbi.nlm.nih.gov/pubmed/15762432 ER -

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