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Design and optimization of a MEMS electret-based capacitive energy scavenger Export

Microelectromechanical Systems, Journal of, Vol. 14, No. 3. (2005), pp. 429-435.

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In this paper, a method for the design and optimization of an electret-based vibration-to-electric microconverter is presented, using a nonlinear dynamical model of the device. The dynamics of the converter is analyzed in detail, showing the importance of properly accounting for the nonlinearity in the optimization process. A procedure to determine a set of optimization parameters is finally presented.


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