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Transmission electron microscopy: A critical analytical tool for ULSI technology Export

by: David Venables, David W. Susnitzky, John A. Mardinly

edited by: David G. Seiler, Alain C. Diebold, Murray W. Bullis, Thomas J. Shaffner, Robert Mcdonald, Jane E. Walters

The 1998 international conference on characterization and metrology for ULSI technology, Vol. 449, No. 1. (1998), pp. 667-675.

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