CF/sub 4/ decomposition using inductively coupled plasma: effect of power frequency Export

@article{61, abstract = {The performance evaluation of CF/sub 4/ decomposition efficiency using 2- and 4-MHz power supplies was carried out as a function of the power, the pressure, the flow rate, and the quantity of O/sub 2/ addition. When the 2- and 4-MHz power supplies were used, almost complete CF/sub 4/ removal was achieved at 2.0 and 3.0 kW, respectively, when the CF/sub 4/ flow rate was 0.20 normal liters per minute. The optimum O/sub 2//CF/sub 4/ ratio should be in the range of 1.0/spl sim/1.25 in order to decompose CF/sub 4/ efficiently. The CF/sub 4/ decomposition efficiency using the 2-MHz power supply was significantly higher than that of the 4-MHz power supply under the same power, pressure, and flow rate. Significant amounts of byproducts such as COF/sub 2/ and CO were identified by the Fourier transform infrared spectrophotometer analysis in addition to CO/sub 2/.}, author = {Kuroki, T. and Mine, J. and Okubo, M. and Yamamoto, T. and Saeki, N.}, citeulike-article-id = {700490}, citeulike-linkout-0 = {http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=1388680}, journal = {Industry Applications, IEEE Transactions on}, keywords = {cf4-o2, decomposition, icp}, number = {1}, pages = {215--220}, posted-at = {2006-06-19 10:21:45}, priority = {0}, title = {CF/sub 4/ decomposition using inductively coupled plasma: effect of power frequency}, url = {http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=1388680}, volume = {41}, year = {2005} }

TY - JOUR ID - 61 L3 - citeulike-article-id:700490 N2 - The performance evaluation of CF/sub 4/ decomposition efficiency using 2- and 4-MHz power supplies was carried out as a function of the power, the pressure, the flow rate, and the quantity of O/sub 2/ addition. When the 2- and 4-MHz power supplies were used, almost complete CF/sub 4/ removal was achieved at 2.0 and 3.0 kW, respectively, when the CF/sub 4/ flow rate was 0.20 normal liters per minute. The optimum O/sub 2//CF/sub 4/ ratio should be in the range of 1.0/spl sim/1.25 in order to decompose CF/sub 4/ efficiently. The CF/sub 4/ decomposition efficiency using the 2-MHz power supply was significantly higher than that of the 4-MHz power supply under the same power, pressure, and flow rate. Significant amounts of byproducts such as COF/sub 2/ and CO were identified by the Fourier transform infrared spectrophotometer analysis in addition to CO/sub 2/. IS - 1 JF - Industry Applications, IEEE Transactions on EP - 220 TI - CF/sub 4/ decomposition using inductively coupled plasma: effect of power frequency VL - 41 SP - 215 KW - cf4-o2 KW - decomposition KW - icp AU - Kuroki, T AU - Mine, J AU - Okubo, M AU - Yamamoto, T AU - Saeki, N PY - 2005/// UR - http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=1388680 ER -