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these_morel's D'agostino:R [2 articles] Export Sort

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plasma	54
etching	48
introduction	46
tungsten	45
xps	39
dispositifs-experimentaux	26
high-k	22
hfo2	19
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	$My PDF fracassi_95_dry.pdf$ Dry etching of titanium nitride thin films in CF[sub 4]--O[sub 2] plasmas [My Copy] Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 13, No. 2. (1995), pp. 335-342. by F. Fracassi, R. D'agostino, R. Lamendola, I. Mangieri posted to cf4-o2 etching titane_nitride xps by these_morel on 2006-12-13 15:42:58 as
	$My PDF fracassi_92_chemistry.pdf$ Chemistry of titanium dry etching in fluorinated and chlorinated gases [My Copy] pure and applied chemistry, Vol. 64, No. 5. (1992), pp. 703-707. by Francesco Fracassi, Riccardo D'agostino posted to cf4-o2 cl2-o2 titanium by these_morel on 2006-02-17 14:06:01 as