these_morel's Sha:L [4 articles] Export Sort

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	Ion-enhanced chemical etching of ZrO[sub 2] in a chlorine discharge [My Copy] Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 20, No. 5. (2002), pp. 1525-1531. by Lin Sha, Byeong O. Cho, Jane P. Chang posted to cl2 high-k zro2 by these_morel on 2006-02-21 09:47:00 as
	Plasma etching of high dielectric constant materials on silicon in halogen chemistries [My Copy] Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 22, No. 1. (2004), pp. 88-95. by Lin Sha, Jane P. Chang posted to bcl3 cl2 hfo2 high-k zro2 by these_morel on 2006-02-21 09:44:45 as
	Plasma etching selectivity of ZrO[sub 2] to Si in BCl[sub 3]/Cl[sub 2] plasmas [My Copy] Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 21, No. 6. (2003), pp. 1915-1922. by Lin Sha, Jane P. Chang posted to bcl3 cl2 etching high-k zro2 by these_morel on 2006-02-21 09:40:20 as along with 2 people blswenson newmansc
	Ion-enhanced chemical etching of HfO[sub 2] for integration in metal--oxide--semiconductor field effect transistors [My Copy] Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 21, No. 6. (2003), pp. 2420-2427. by Lin Sha, Ragesh Puthenkovilakam, You S. Lin, Jane P. Chang posted to dielectric hfo2 high-k by these_morel on 2006-02-21 09:36:28 as

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plasma	54
etching	48
introduction	46
tungsten	45
xps	39
dispositifs-experimentaux	26
high-k	22
hfo2	19
rie	16
cl2	15
tungsten-nitride	15
icp	15
cl2-o2	14
poly-si	13
actinometry	11
microelectronics	11
gate	10
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silicon	9
metal	9
mass-spectrometry	9
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fluorocarbon	8
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metal-gate	8
tin	7
passivation	7
molybdenum	7
absorption	7
cf4-o2	7
fluorine	7
polydepletion	6
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titane_nitride	5
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sf6-o2	5
annexes	4
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oxidation	4
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ecr	4
wet-etching	4
effet-de-charge	3
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tungsten-oxide	3
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tem	3
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nitrogen	3
nf3-o2	2
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wocl	2
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xrr	2
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gravure	1
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morel	1
sputter-deposition	1
negative-ion	1
taper	1
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45nm	1
cbrf3	1
dry-etching	1
line-edge-roughness	1
midgap	1
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interconnections	1
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zralo	1
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pulverisation	1
wco6	1
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sf6-ar-cl2	1
dhf	1
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angle	1
hfon	1
eot	1
floating_sample	1
co	1
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new-devices	1
microtrenching	1
aluminium	1
ccl4-o2	1
moores-law	1
wiggling	1
molecular-beam-system	1
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clo	1
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uhf-ecr	1
tcp_9400	1
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deformation-resist	1
tcp	1
lam	1
capacitive	1
interferometry	1

these_morel's Sha:L [4 articles] Export Sort

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