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these_morel's hfalo [2 articles] Export Sort

Recent papers added to these_morel's library classified by the tag hfalo. You can also see everyone's hfalo.

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Development of Damage Free HfAlO Removal Process Using Plasma Treatment.

In 2004 Dry Process International Symposium (2004)

by J. W. Sun, C. H. Shin, G. J. Min, C. J. Kang, H. K. Cho, J. T. Moon

posted to ar cf4 hfalo high-k plasma rie by these_morel on 2006-03-21 07:40:08 as read

Investigation of etching properties of HfO based high-K dielectrics using inductively coupled plasma

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 22, No. 4. (2004), pp. 1552-1558.

by Jinghao Chen, Won J. Yoo, Zerlinda Y. L. Tan, Yingqian Wang, Daniel S. H. Chan

posted to cl2-o2 fluorine hbr-o2 hfalo hfo2 hfon hfsio high-k xps by these_morel on 2006-02-17 15:12:43 as read

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plasma	54
etching	48
introduction	46
tungsten	45
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annexes	4
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oxidation	4
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sputter-deposition	1
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45nm	1
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3d-integration	1
magnetoplasma	1
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gate-patterning	1
pulverisation	1
wco6	1
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