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these_morel's polydepletion [6 articles] Export

Recent papers added to these_morel's library classified by the tag polydepletion. You can also see everyone's polydepletion.

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	Modulation du travail de sortie de grilles métalliques totalement siliciurées pour des dispositifs CMOS déca-nanométriques. [My Copy] (2007) by Delphine Aime posted to introduction polydepletion work-function by these_morel on 2008-10-27 09:19:02 as
	Accurate determination of ultrathin gate oxide thickness and effective polysilicon doping of CMOS devices [My Copy] Electron Device Letters, IEEE In Electron Device Letters, IEEE, Vol. 18, No. 12. (1997), pp. 580-582. by A. Gupta, Peng Fang, M. Song, et al.Ming-Ren Lin, D. Wollesen, K. Chen, C. Hu posted to introduction microelectronics polydepletion by these_morel on 2008-05-16 12:55:02 as
	Polysilicon gate depletion effect on IC performance [My Copy] Solid-State Electronics, Vol. 38, No. 11. (November 1995), pp. 1975-1977. by Kai Chen, Mansun Chan, Ping K. Ko, Chenming Hu, Jian-Hui Huang posted to introduction microelectronics polydepletion by these_morel on 2008-05-16 08:06:41 as
	Anomalous C-V characteristics of implanted polyMOS structure in n+/p+ dual-gate CMOS technology [My Copy] Electron Device Letters, IEEE In Electron Device Letters, IEEE, Vol. 10, No. 5. (1989), pp. 192-194. by C. Y. Lu, J. M. Sung, H. C. Kirsch, S. J. Hillenius, T. E. Smith, L. Manchanda posted to introduction microelectronics polydepletion by these_morel on 2008-05-16 07:55:26 as
	Gate oxide scaling limits and projection [My Copy] Electron Devices Meeting, 1996., International In Electron Devices Meeting, 1996., International (1996), pp. 319-322. by Chenming Hu posted to eot introduction microelectronics polydepletion tunneling by these_morel on 2008-05-15 15:45:00 as
	Gate length dependent polysilicon depletion effects [My Copy] Electron Device Letters, IEEE In Electron Device Letters, IEEE, Vol. 23, No. 4. (2002), pp. 224-226. by Chang-Hoon Choi, P. R. Chidambaram, R. Khamankar, C. F. Machala, Zhiping Yu, R. W. Dutton posted to introduction microelectronics polydepletion by these_morel on 2008-05-15 15:35:15 as

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plasma	54
etching	48
introduction	46
tungsten	45
xps	39
dispositifs-experimentaux	26
high-k	22
hfo2	19
rie	16
cl2	15
tungsten-nitride	15
icp	15
cl2-o2	14
poly-si	13
actinometry	11
microelectronics	11
gate	10
dielectric	9
silicon	9
metal	9
mass-spectrometry	9
cf4	9
fluorocarbon	8
parois	8
metal-gate	8
tin	7
passivation	7
molybdenum	7
absorption	7
cf4-o2	7
fluorine	7
polydepletion	6
sf6	6
reactor	6
plasmas	6
cmos	5
titane_nitride	5
notching	5
resist-trimming	5
tan	5
sf6-n2	5
wsi	5
hbr	5
sf6-ar	5
cleaning	5
sf6-o2	5
annexes	4
sio2	4
hbr-cl2-o2	4
bcl3	4
oxidation	4
nf3	4
ecr	4
wet-etching	4
effet-de-charge	3
volatility	3
ar	3
zro2	3
recess	3
chemical-vapor-deposition	3
decomposition	3
dual-metal-gate	3
dissociation	3
tungsten-oxide	3
work-function	3
tem	3
resistivity	3
temperature	3
tunneling	3
optical-emission-spectroscopy	3
nitrogen	3
nf3-o2	2
hfalo	2
ruthenium	2
titanium	2
deposition	2
doping	2
o2	2
wcl	2
wocl	2
wsix	2
xrr	2
materials	2
chf3	2
polymer_layer	2
c4f8	2
arxps	2
meb	2
microloading	2
hbr-o2	2
bcl3-o2	2
sicl4-cl2	2
cf4-cl2	2
incorporation	2
helicon-plasma	2
cl2-nf3-o2	2
n2	1
thomas	1
hf	1
cf3-cl	1
gravure	1
photoresist	1
nf3-he	1
morel	1
sputter-deposition	1
negative-ion	1
taper	1
c4f8-ar-h2	1
45nm	1
cbrf3	1
dry-etching	1
line-edge-roughness	1
midgap	1
eels	1
tungstene	1
nf3-h2	1
vlsi	1
wcl4	1
hfsio	1
hfn	1
hfsion	1
interconnections	1
oxygen	1
microelectronique	1
3d-integration	1
magnetoplasma	1
silicidation	1
zralo	1
overetch	1
co2	1
bowing	1
gate-patterning	1
pulverisation	1
wco6	1
etchback	1
neural-networks	1
mosi	1
chf3-cl2-bcl3	1
sf6-ar-cl2	1
dhf	1
time-delay-effect	1
angle	1
hfon	1
eot	1
floating_sample	1
co	1
tac	1
new-devices	1
microtrenching	1
aluminium	1
ccl4-o2	1
moores-law	1
wiggling	1
molecular-beam-system	1
damage	1
clo	1
masking-materials	1
nh3	1
eftem	1
selectivity	1
lpcvd	1
uhf-ecr	1
tcp_9400	1
sf6-chf3	1
deformation-resist	1
tcp	1
lam	1
capacitive	1
interferometry	1

these_morel's polydepletion [6 articles] Export

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