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Polymer-based variable focal length microlens system Export

Journal of Micromechanics and Microengineering, Vol. 14 (December 2004), pp. 1665-1673.

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hydrostatic lens liquid membrane pneumatic tunable

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A novel polymer-based fluid-actuated variable focal length microlenssystem with a wide field-of-view (FOV) and large numerical aperture isdesigned and fabricated using standard photolithographic and siliconmicromachining techniques. A flexible polydimethylsiloxane (PDMS)membrane is used to form the lens surface and is actuated by fluidicpressure applied by an external syringe pump. This lens system iscapable of working in dual mode, forming either a double convex (DCX) ora double concave (DCV) lens. The relationship between the focal length(f) and FOV of the fabricated dynamic lens system as a function of thevolume of the fluid pumped into or out of the lens chamber isinvestigated. The focal length of the dynamic lens system demonstratedin this paper could be tuned in the range of 75.9 to 3.1 mm and -75.9 to-3.3 mm for the DCX and DCV lens configurations, respectively. The FOVfor this lens system was found to be in the range of 0.12 to 61°for DCX lens and 7 to 69° for DCV lens. The smallest F-number(f<SUB>/#</SUB>) that could be achieved using this dynamic lens is 0.61,which corresponds to the numerical aperture value of 0.64.


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