Piezoresistive cantilever as portable micro force calibration standard Export

@article{citeulike:3191073, abstract = {Design, fabrication and test of cantilever-type sensors for active micro force calibration are described. The cantilever comprises a probing tip at its free end where a force can be applied which is measured using a piezoresistive strain gauge at the cantilever suspension. The stiffness of the cantilever is approximately given by the spring constant of a beam with a rectangular cross section as confirmed by finite element modelling. Prototypes with a stiffness of 0.66 N m[?]1 and 7.7 N m[?]1 are realized using standard silicon bulk micromachining technology. Testing is performed using a high-resolution micro force measuring set-up. In either case a highly linear relationship between the gauge output voltage and the probing force is revealed in the uN range. Low scatter and drift corresponding to a standard deviation of +-0.22\% was found for the resulting force sensitivity.}, author = {Behrens, I. and Doering, L. and Peiner, E.}, citeulike-article-id = {3191073}, citeulike-linkout-0 = {http://dx.doi.org/10.1088/0960-1317/13/4/325}, doi = {10.1088/0960-1317/13/4/325}, journal = {Journal of Micromechanics and Microengineering}, keywords = {spring-constant}, number = {4}, pages = {S171--S177}, posted-at = {2008-09-04 11:14:06}, priority = {3}, title = {Piezoresistive cantilever as portable micro force calibration standard}, url = {http://dx.doi.org/10.1088/0960-1317/13/4/325}, volume = {13}, year = {2003} }

TY - JOUR ID - citeulike:3191073 L3 - citeulike-article-id:3191073 N2 - Design, fabrication and test of cantilever-type sensors for active micro force calibration are described. The cantilever comprises a probing tip at its free end where a force can be applied which is measured using a piezoresistive strain gauge at the cantilever suspension. The stiffness of the cantilever is approximately given by the spring constant of a beam with a rectangular cross section as confirmed by finite element modelling. Prototypes with a stiffness of 0.66 N m[?]1 and 7.7 N m[?]1 are realized using standard silicon bulk micromachining technology. Testing is performed using a high-resolution micro force measuring set-up. In either case a highly linear relationship between the gauge output voltage and the probing force is revealed in the uN range. Low scatter and drift corresponding to a standard deviation of +-0.22% was found for the resulting force sensitivity. IS - 4 JF - Journal of Micromechanics and Microengineering EP - S177 TI - Piezoresistive cantilever as portable micro force calibration standard VL - 13 SP - S171 KW - spring-constant AU - Behrens, I AU - Doering, L AU - Peiner, E PY - 2003/// UR - http://dx.doi.org/10.1088/0960-1317/13/4/325 ER -