Stiction, adhesion energy, and the Casimir effect in micromechanical systems Export

@article{Buks2001, abstract = {We measure the adhesion energy of gold using a micromachined cantilever beam. Stress and stiffness of the beam are characterized by measuring the spectrum of mechanical vibrations and the deflection due to external force. We induce stiction between the beam and a nearby surface, employing capillary forces to determine the adhesion energy γ. The obtained value γ=0.06 J/m2 is a factor of 6 smaller than that predicted by idealized theory. This discrepancy may arise from surface roughness or an adsorbed layer intervening between the contacting surfaces in these mesoscopic structures.}, author = {Buks, E. and Ml}, citeulike-article-id = {3138380}, journal = {Physics Review B}, keywords = {casimir-effect, mems, nems}, number = {033-402}, pages = {1--4}, pdf = {D:\\Research\\reference\\papers\\casimir3.pdf}, posted-at = {2008-08-20 03:12:51}, priority = {2}, title = {Stiction, adhesion energy, and the Casimir effect in micromechanical systems}, volume = {63}, year = {2001} }

TY - JOUR ID - Buks2001 L3 - citeulike-article-id:3138380 N2 - We measure the adhesion energy of gold using a micromachined cantilever beam. Stress and stiffness of the beam are characterized by measuring the spectrum of mechanical vibrations and the deflection due to external force. We induce stiction between the beam and a nearby surface, employing capillary forces to determine the adhesion energy γ. The obtained value γ=0.06 J/m2 is a factor of 6 smaller than that predicted by idealized theory. This discrepancy may arise from surface roughness or an adsorbed layer intervening between the contacting surfaces in these mesoscopic structures. IS - 033-402 JF - Physics Review B EP - 4 TI - Stiction, adhesion energy, and the Casimir effect in micromechanical systems VL - 63 SP - 1 KW - casimir-effect KW - mems KW - nems AU - Buks, E AU - Ml PY - 2001/// ER -