Microelectromechanical Systems Tunable Frequency-Selective Surfaces and Electromagnetic-Bandgap Structures on Rigid-Flex Substrates TeX Export

@article{fss1, abstract = {<para> A novel microelectromechanical systems (MEMS) process is developed to fabricate large numbers of high-performance MEMS devices monolithically integrated onto a rigid-flex organic substrate using low-temperature processes. The rigid-flex substrate is all dielectric, which is amenable to low-loss electromagnetic structures. The substrate provides mechanical support to the MEMS devices while maintaining overall flexibility. The newly developed process is used to fabricate a MEMS reconfigurable frequency-selective surface (FSS). A practical bias network is incorporated into the structure design to ensure that all devices are actuated simultaneously. A detailed parametric sensitivity analysis establishes the robustness of the FSS design with respect to fabrication process variations. FSS structures operating in the <formula><tex>\$Ku\$</tex></formula>- and <formula><tex>\$Ka\$</tex></formula>-bands are fabricated and tested with good correlation between simulated and measured results. The newly developed MEMS process is also used to fabricate a reconfigurable electromagnetic-bandgap (EBG) structure. An EBG structure operating in the <formula><tex>\$Ka\$</tex> </formula>-band is fabricated and tested to verify the validity of the proposed concept. </para>}, author = {Coutts, G. M. and Mansour, R. R. and Chaudhuri, S. K.}, booktitle = {Microwave Theory and Techniques, IEEE Transactions on}, citeulike-article-id = {3138483}, citeulike-linkout-0 = {http://dx.doi.org/10.1109/TMTT.2008.925575}, citeulike-linkout-1 = {http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=4545887}, doi = {10.1109/TMTT.2008.925575}, journal = {Microwave Theory and Techniques, IEEE Transactions on}, keywords = {ebg, fss, mems}, number = {7}, pages = {1737--1746}, posted-at = {2008-08-20 05:06:00}, priority = {3}, title = {Microelectromechanical Systems Tunable Frequency-Selective Surfaces and Electromagnetic-Bandgap Structures on Rigid-Flex Substrates}, url = {http://dx.doi.org/10.1109/TMTT.2008.925575}, volume = {56}, year = {2008} }

TY - JOUR ID - fss1 L3 - citeulike-article-id:3138483 N2 - <para> A novel microelectromechanical systems (MEMS) process is developed to fabricate large numbers of high-performance MEMS devices monolithically integrated onto a rigid-flex organic substrate using low-temperature processes. The rigid-flex substrate is all dielectric, which is amenable to low-loss electromagnetic structures. The substrate provides mechanical support to the MEMS devices while maintaining overall flexibility. The newly developed process is used to fabricate a MEMS reconfigurable frequency-selective surface (FSS). A practical bias network is incorporated into the structure design to ensure that all devices are actuated simultaneously. A detailed parametric sensitivity analysis establishes the robustness of the FSS design with respect to fabrication process variations. FSS structures operating in the <formula><tex>$Ku$</tex></formula>- and <formula><tex>$Ka$</tex></formula>-bands are fabricated and tested with good correlation between simulated and measured results. The newly developed MEMS process is also used to fabricate a reconfigurable electromagnetic-bandgap (EBG) structure. An EBG structure operating in the <formula><tex>$Ka$</tex> </formula>-band is fabricated and tested to verify the validity of the proposed concept. </para> IS - 7 JF - Microwave Theory and Techniques, IEEE Transactions on EP - 1746 TI - Microelectromechanical Systems Tunable Frequency-Selective Surfaces and Electromagnetic-Bandgap Structures on Rigid-Flex Substrates VL - 56 T2 - Microwave Theory and Techniques, IEEE Transactions on SP - 1737 KW - ebg KW - fss KW - mems AU - Coutts, GM AU - Mansour, RR AU - Chaudhuri, SK PY - 2008/// UR - http://dx.doi.org/10.1109/TMTT.2008.925575 ER -