Micromachined RF-Coupled Cantilever Inverted-Microstrip Millimeter-Wave Filters Export

@article{citeulike:3173723, abstract = {This paper introduces a new concept for implementing millimeter-wave filters intended for monolithic integration. The approach uses silicon micromachining and wafer bonding techniques to create inverted-microstrip transmission lines in air and radio frequency (RF)-coupled cantilevers. A third-order filter demonstrated a measured insertion loss of only 0.54 dB at 76.5 GHz. Simple MEMS tuning of 60-GHz coupled-line resonators has also been demonstrated for the first time. This paper could form the basis for a new type of low-loss tunable distributed-element RF microelectromechanical system filter technology for millimeter-wave applications.}, author = {Lucyszyn, S. and Miyaguchi, K. and Jiang, H. W. and Robertson, I. D. and Fisher, G. and Lord, A. and Choi, Joo-Young}, booktitle = {Microelectromechanical Systems, Journal of}, citeulike-article-id = {3173723}, citeulike-linkout-0 = {http://dx.doi.org/10.1109/JMEMS.2008.922081}, citeulike-linkout-1 = {http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=4538090}, doi = {10.1109/JMEMS.2008.922081}, journal = {Microelectromechanical Systems, Journal of}, keywords = {drie, filter, mems, micromachining, microstrip-filters}, number = {3}, pages = {767--776}, posted-at = {2008-08-29 18:51:19}, priority = {2}, title = {Micromachined RF-Coupled Cantilever Inverted-Microstrip Millimeter-Wave Filters}, url = {http://dx.doi.org/10.1109/JMEMS.2008.922081}, volume = {17}, year = {2008} }

TY - JOUR ID - citeulike:3173723 L3 - citeulike-article-id:3173723 N2 - This paper introduces a new concept for implementing millimeter-wave filters intended for monolithic integration. The approach uses silicon micromachining and wafer bonding techniques to create inverted-microstrip transmission lines in air and radio frequency (RF)-coupled cantilevers. A third-order filter demonstrated a measured insertion loss of only 0.54 dB at 76.5 GHz. Simple MEMS tuning of 60-GHz coupled-line resonators has also been demonstrated for the first time. This paper could form the basis for a new type of low-loss tunable distributed-element RF microelectromechanical system filter technology for millimeter-wave applications. IS - 3 JF - Microelectromechanical Systems, Journal of EP - 776 TI - Micromachined RF-Coupled Cantilever Inverted-Microstrip Millimeter-Wave Filters VL - 17 T2 - Microelectromechanical Systems, Journal of SP - 767 KW - drie KW - filter KW - mems KW - micromachining KW - microstrip-filters AU - Lucyszyn, S AU - Miyaguchi, K AU - Jiang, HW AU - Robertson, ID AU - Fisher, G AU - Lord, A AU - Choi, Joo-Young PY - 2008/// UR - http://dx.doi.org/10.1109/JMEMS.2008.922081 ER -