On the Dynamic Response of Electrostatic MEMS Switches Export

@article{citeulike:3173749, abstract = {The undamped dynamic response of electrostatic MEMS switches that are driven by a step-function voltage is investigated. A systematic analysis using energy methods is presented. An analytic expression for switching time is derived and this expression may be used as a design rule for electrostatic switches. The analytic predictions are validated experimentally using test structures with parallel-plates actuators. It is shown that the analysis is also applicable for switches with more general geometry.}, author = {Leus, V. and Elata, D.}, booktitle = {Microelectromechanical Systems, Journal of}, citeulike-article-id = {3173749}, citeulike-linkout-0 = {http://dx.doi.org/10.1109/JMEMS.2007.908752}, citeulike-linkout-1 = {http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=4432924}, doi = {10.1109/JMEMS.2007.908752}, journal = {Microelectromechanical Systems, Journal of}, keywords = {dynamics, electrostatic-actuation, mems, mems-switch}, number = {1}, pages = {236--243}, posted-at = {2008-08-29 19:11:38}, priority = {2}, title = {On the Dynamic Response of Electrostatic MEMS Switches}, url = {http://dx.doi.org/10.1109/JMEMS.2007.908752}, volume = {17}, year = {2008} }

TY - JOUR ID - citeulike:3173749 L3 - citeulike-article-id:3173749 N2 - The undamped dynamic response of electrostatic MEMS switches that are driven by a step-function voltage is investigated. A systematic analysis using energy methods is presented. An analytic expression for switching time is derived and this expression may be used as a design rule for electrostatic switches. The analytic predictions are validated experimentally using test structures with parallel-plates actuators. It is shown that the analysis is also applicable for switches with more general geometry. IS - 1 JF - Microelectromechanical Systems, Journal of EP - 243 TI - On the Dynamic Response of Electrostatic MEMS Switches VL - 17 T2 - Microelectromechanical Systems, Journal of SP - 236 KW - dynamics KW - electrostatic-actuation KW - mems KW - mems-switch AU - Leus, V AU - Elata, D PY - 2008/// UR - http://dx.doi.org/10.1109/JMEMS.2007.908752 ER -