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Evaluation of contacts for a MEMS thermal switch Export

Journal of Micromechanics and Microengineering, Vol. 18, No. 10. (2008), 105012.

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liquid-metal mems thermal-contact

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1. this study shows that liquid-metal contact exhibit much better heat conductance compared with carbon-nanotube bundles.

z3phyr (public note) - 2008-10-02 23:07:42

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In this paper we present the evaluation of contact materials for a MEMS thermal switch. The contact materials considered were liquid-metal micro-droplets and aligned carbon nanotube arrays. Five switch configurations were tested. The thermal interfacial resistance of the switches was measured. The liquid metal switch had a minimum thermal interfacial resistance of 1.1 mm2 K W[?]1. The minimum thermal interfacial resistance of the best carbon nanotube thermal switch was 20.4 mm2 K W[?]1. The ratio of the switch off to on thermal resistance was measured for each configuration. Based on these measurements, a switch incorporating liquid-metal droplets is found to be superior to switches incorporating aligned carbon nanotubes.


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