Electrostatic analysis of a comb-finger actuator with Schwarz–Christoffel conformal mapping Export

@article{roy2006a, abstract = {The design and the analysis of a comb-finger actuator require the evaluation of the coupling capacitances as well as the estimation of the electrostatic forces. Several approaches are possible: very rough approximations based on combinations of parallel plate capacitor elements, analytical or numerical Schwarz\&\#x2013;Christoffel (SC) conformal mapping-based techniques, numerical solutions of the electrostatic field equations. Powerful numerical approaches can be very accurate, but heavy and time-consuming, while simple approaches are very inaccurate. A partially analytical approximate method based on SC conformal mapping is discussed. The comparison with results from standard simulators and experimental measurements demonstrates that the studied procedure is fast and satisfactorily accurate.}, author = {Bruschi, P. and Nannini, A. and Pieri, F. and Raffa, G. and Vigna, B. and Zerbini, S.}, citeulike-article-id = {3463769}, citeulike-linkout-0 = {http://dx.doi.org/10.1016/j.sna.2004.02.038}, citeulike-linkout-1 = {http://linkinghub.elsevier.com/retrieve/pii/S092442470400161X}, day = {15}, doi = {10.1016/j.sna.2004.02.038}, issn = {09244247}, journal = {Sensors and Actuators A: Physical}, keywords = {conformal-mapping, fringing-field, schwartz-christoffer}, month = {June}, number = {1}, pages = {106--117}, posted-at = {2008-10-29 23:38:26}, priority = {2}, title = {Electrostatic analysis of a comb-finger actuator with Schwarz–Christoffel conformal mapping}, url = {http://dx.doi.org/10.1016/j.sna.2004.02.038}, volume = {113}, year = {2004} }

TY - JOUR ID - roy2006a L3 - citeulike-article-id:3463769 N2 - The design and the analysis of a comb-finger actuator require the evaluation of the coupling capacitances as well as the estimation of the electrostatic forces. Several approaches are possible: very rough approximations based on combinations of parallel plate capacitor elements, analytical or numerical Schwarz–Christoffel (SC) conformal mapping-based techniques, numerical solutions of the electrostatic field equations. Powerful numerical approaches can be very accurate, but heavy and time-consuming, while simple approaches are very inaccurate. A partially analytical approximate method based on SC conformal mapping is discussed. The comparison with results from standard simulators and experimental measurements demonstrates that the studied procedure is fast and satisfactorily accurate. IS - 1 JF - Sensors and Actuators A: Physical SN - 09244247 EP - 117 TI - Electrostatic analysis of a comb-finger actuator with Schwarz–Christoffel conformal mapping VL - 113 SP - 106 KW - conformal-mapping KW - fringing-field KW - schwartz-christoffer AU - Bruschi, P AU - Nannini, A AU - Pieri, F AU - Raffa, G AU - Vigna, B AU - Zerbini, S PY - 2004/06/15/ UR - http://dx.doi.org/10.1016/j.sna.2004.02.038 ER -