Temperature variation of actuation voltage in capacitive MEMS switches Export

@article{Goldsmith:2005, abstract = {A simple theoretical model for temperature variation of actuation voltage for fixed-fixed beam switches is developed and applied to model capacitive radio frequency microelectromechanical systems switches. Measured data from these switches fit very well with the model over a 120\°C operating temperature range, demonstrating an average 0.127V/\°C to 0.132V/\°C with less than 8\% deviation between measured and modeled results. The proposed model provides valuable insight into the factors impacting variability of actuation voltage over broad temperature ranges.}, author = {Goldsmith, C. L. and Forehand, D. I.}, booktitle = {Microwave and Wireless Components Letters, IEEE}, citeulike-article-id = {4026340}, citeulike-linkout-0 = {http://dx.doi.org/10.1109/LMWC.2005.856827}, citeulike-linkout-1 = {http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=1512233}, comment = {• Temperature variation can cause unnecessary large variation in control voltage. Operation at low temperature will require excessive large actuation voltage (at low voltage, extreme tensile stress is induced). • Previous published data showed temperature variation of actuation voltage in the order of 0.3-0.5V/C. • This paper reports 0.127-0.132V/C variation in the -45\~{}70C range. • Critical buckling of the shunt bridge is observed by the capacitance reading. • Devices from two different wafers exhibit actuation voltage difference of about 8V, (out of 24\~{}32V) }, doi = {10.1109/LMWC.2005.856827}, journal = {Microwave and Wireless Components Letters, IEEE}, keywords = {capacitive-switch, mems-switch, memtronic-switch, temperature-stability}, number = {10}, pages = {718--720}, posted-at = {2009-02-09 19:42:15}, priority = {3}, title = {Temperature variation of actuation voltage in capacitive MEMS switches}, url = {http://dx.doi.org/10.1109/LMWC.2005.856827}, volume = {15}, year = {2005} }

TY - JOUR ID - Goldsmith:2005 L3 - citeulike-article-id:4026340 N2 - A simple theoretical model for temperature variation of actuation voltage for fixed-fixed beam switches is developed and applied to model capacitive radio frequency microelectromechanical systems switches. Measured data from these switches fit very well with the model over a 120°C operating temperature range, demonstrating an average 0.127V/°C to 0.132V/°C with less than 8% deviation between measured and modeled results. The proposed model provides valuable insight into the factors impacting variability of actuation voltage over broad temperature ranges. IS - 10 JF - Microwave and Wireless Components Letters, IEEE EP - 720 TI - Temperature variation of actuation voltage in capacitive MEMS switches VL - 15 T2 - Microwave and Wireless Components Letters, IEEE SP - 718 KW - capacitive-switch KW - mems-switch KW - memtronic-switch KW - temperature-stability N1 - • Temperature variation can cause unnecessary large variation in control voltage. Operation at low temperature will require excessive large actuation voltage (at low voltage, extreme tensile stress is induced). • Previous published data showed temperature variation of actuation voltage in the order of 0.3-0.5V/C. • This paper reports 0.127-0.132V/C variation in the -45~70C range. • Critical buckling of the shunt bridge is observed by the capacitance reading. • Devices from two different wafers exhibit actuation voltage difference of about 8V, (out of 24~32V) AU - Goldsmith, CL AU - Forehand, DI PY - 2005/// UR - http://dx.doi.org/10.1109/LMWC.2005.856827 ER -