z3phyr's mems [47 articles] Export

Recent papers added to z3phyr's library classified by the tag mems. You can also see everyone's mems.

	The development of micro-gyroscope technology [My Copy] Journal of Micromechanics and Microengineering, Vol. 19, No. 11. (2009), 113001. by Kai Liu, Weiping Zhang, Wenyuan Chen, et al.Kai Li, Fuyan Dai, Feng Cui, Xiaosheng Wu, Gaoyin Ma, Qijun Xiao posted to review mems gyroscope by z3phyr on 2009-11-14 16:26:51 as
	Anelastic Stress Relaxation in Gold Films and Its Impact on Restoring Forces in MEMS Devices [My Copy] Microelectromechanical Systems, Journal of In Microelectromechanical Systems, Journal of, Vol. 18, No. 3. (14 April 2009), pp. 570-576. by X. Yan, W. L. Brown, Y. Li, et al.J. Papapolymerou, C. Palego, J. C. M. Hwang, R. P. Vinci posted to creep mems rf-mems by z3phyr on 2009-06-05 03:27:54 as
	Evaluation of platinum as a structural thin film material for RF-MEMS devices [My Copy] Journal of Micromechanics and Microengineering, Vol. 19, No. 6. (2009), 065010. by P. Ekkels, X. Rottenberg, R. Puers, H. A. C. Tilmans posted to materials mems mems-switch rf-mems by z3phyr on 2009-05-26 17:03:46 as
	Pull-in and snap-through instabilities in transient deformations of microelectromechanical systems [My Copy] Journal of Micromechanics and Microengineering, Vol. 19, No. 3. (2009), 035008. by K. Das, R. C. Batra posted to dynamics electrostatic-actuation mems pullin-voltage snap-through by z3phyr on 2009-02-26 19:44:54 as
	Microactuators for GaAs-based microwave integrated circuits [My Copy] Solid-State Sensors and Actuators, 1991. Digest of Technical Papers, TRANSDUCERS '91., 1991 International Conference on In Solid-State Sensors and Actuators, 1991. Digest of Technical Papers, TRANSDUCERS '91., 1991 International Conference on (1991), pp. 743-746. by L. E. Larson, R. H. Hackett, R. F. Lohr posted to mems rf-mems by z3phyr on 2009-02-13 17:22:13 as
	Microfabrication for Millimeter W [My Copy] by Heino Henke, Robert Siemann posted to klystron mems vacuum-science by z3phyr on 2009-02-13 16:27:52 as along with 944 people and 149 groups lauratest pkt thegoose berylschaefer Venu convulted nina4citeulike AJCann smccord chethrington NitinCR Compartia MariekeVanWamel cvq gurprit_raunu refkit fordela Thaverkamp kennedie yuichi1004 sheshebrown marinari eunsugee derchao yse guhjy alexloh80 Zaraitzu RMT Shindy Biomedyknight lesikv TomQ pyjamashark Becky_Shen RandolphCarter LaurieEMiller skolaric smogit apokgmc ldietz ibbuntu bleong mansaok nnikolaj jyew christianholz lottebelice m8eld1989 mchinen magalb Xountini gimpf watersiren cwtjoa agogoh3 samanthahut rsilveira79 andresmh kgutwin thyk mboehmer bernstei waghsk kimlab mlovelace BioNica diomede tulaydemir doncieux szielke daniel_pang paulducker thomast3 brothers hplatero suneilmohan bazza030 jjray jimjoe IulianGherghel pnauer jhibbits alexstorer chem-pion ImranRaoufMalik lisa1 Evangelia 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softsimu vlado CameronNeylon emmackinnon fbr susz mazsx cveres johnabender HugoMarcelo dlobo fernand0 dperkel egh samth sora florine ladygoat hopm hellige parmentierf ssn mortimer tinkha V plaugg ansobol mjaz berthelemy eldan pdlug zephoria carloscabanillas Janos bkliethermes nazareno elsantosneto januadiaboli yaroslavvb jurijmlotman geomblog srl bigga treycausey CSG mcphee chandrashekar denns matzke sherrivokey sona cassj lijil hlovise coolger bigmagpie alicetiara yorgos johannsen cavlec smbrower viller jenmy mlzafron tymmail mtruksa pauldobson qbin1304 fluffels loison CVLab BiebmiepLeen marcusbm dumpa afrojapchick asmusolsen jjrodriguez UFGeog mitchee3 rodrigobotelho nealpfox gofsu0 pmaire soloaries HrRossi nschwart derkaiser athma alexbdigital amaitos ejones caitlinshanley lunarmono jblosnich willfox sedging davidr macowell eimaj42jdp Flit BenWillems agallet hawesie sngourlay jolilius rmagf acer ville garyfeng danifazzio willwade gantlord melanieramage mgregg cwb neteler carneym 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duckysherwood scottkb freddan IanBrown squirmelia gkvas hrwiltse mfloris mamadoudiao LTrottier giolakat nikko sarahmccrum malkav30 psique Repton gvandyk1 pdessus joni2am taenneken vrich Neeperando ranger midshipman Corbasson murb carterb applebyb kaniko skumagai Stepstep abdulpur mirweis nlauzier Axis gi0rgi0ne danzinde christiankissig tbolt427 Scis0000002 balicea Langster jeanbean EsepBib pulsus-morbi ezaydens melody scarcelan ablam maburkitt fghjorth austin MariaChiaraP wartaalman dconnelly kungcc sbaete tanneama000 ricckli boellernadja nafets laurabailey iarmac alexispaz pathari steveut wolfe275 dcastro yori amydash rpbharti rwilliamson motchy songpku andrealira Zephyrus wilkinm pchia davidchavalarias 3D24 INC Groep Z2 UCD TACs Master VTI - veille intelligence economique Oxford Hooker Group Web2Learning Web2-0_Education Semantic Web and online learning Gender and ICT e-JC BioVT Security in SOA PIM Semantic Desktop enviro ed Med Anthro @ UF Interactive Archivist Mycology GEB Biocatalysis and Biotransformation UF Geography Department CGREL CMU-HCII NU-PRL UoY-CS-AIG Blog_and_Wiki_Research CompetitionLawAndPolicy Tectonics_and_geomorphology NeuronDynamics Context-driven-testers ReadingLab political_science_students kdl distance remote TUCS-ES_Lab Quantum_physics_Education WAND sims_phd_cohort_2005 ASR digital_youth Librarians biodiversity_conservation Global_biodiversity_model InformationRetrieval Wikipedia AssistiveTechnology Bioinformatics mathgamespatterns folksonomy Neuroscience VisionLab Personal-Information-Management CMS Stoc_Proc_Ecology_WG LanguageAndBrain BrainTheory dtl hdm id vds-arg ALF DPR EvolutionaryComputation STS infovis 2ndFloor fammed-publichealth AI eni Biofluid FAB-lab DSS NeuralNetworks mobilecomputing tmig_psycho RETA SITCRC CDG cliamte_change folk_epistemology instaar_graduate_students Projet_ENSIMAG climate_change BUiGEM social_navigation Macroelectronics ARC04 The_Truants QFRMC_ConsumerCredit Plant-Tissue-Simulation METRIK Metaheuristics Boydian_Society eLearning BioinfoCIPF Nutritional_Polymorphisms CaltechCMP SEGAL Optimization location SNE kickOffTUG-Robocup NanoMechanicsofMetals_MPIMF Georouting Child_Support Software-Architecture moernerlab ilps livingthing HUCO-627-W07 elearning_research PLE-TEL-project Femtochemistry_LMU ediadem ENSSIBVeille memoir ILK ColDyn ImatiGESemantic AGH-IISG PRC_SEA TCD-NDS102-Project Adaptive-Web Microbial-Ecology Flexible_ICT-supported_learning Social_Software_ws_07-08 DialogueResearchGroup AM-VideoGames-Gender dIEMoSIRIS microbiology_nijmegen Europe_GPE ZnO_project ADMiRes Health_Sciences_Librarians Desgin-by-Contract MITCCI Kopelman_Group DarkMarkGroup VivesMinions PostureMobility compneur Philosophy of physics PsychStatsBanter Social Informatics @ IU Patent_Reform Convention on Knowledge Commons feminist_technoscience Roswell Cancer Crosstalk Parsons MFA DT 2008 Thesis Research
	Recent Developments in Polymer MEMS [My Copy] Advanced Materials, Vol. 19, No. 22. (2007), pp. 3783-3790. by C. Liu posted to mems polymer review by z3phyr on 2009-01-23 18:45:51 as
	Micromachines on the march [My Copy] Spectrum, IEEE In Spectrum, IEEE, Vol. 31, No. 5. (1994), pp. 20-31. by J. Bryzek, K. Peterson, W. Mcculley posted to mems review by z3phyr on 2009-01-19 22:06:51 as
	MEMS Technology [My Copy] by Freescale Semiconductor posted to mems review by z3phyr on 2009-01-19 04:33:05 as
	Novel High-Q MEMS Curled-Plate Variable Capacitors Fabricated in 0.35-μm CMOS Technology [My Copy] Microwave Theory and Techniques, IEEE Transactions on In Microwave Theory and Techniques, IEEE Transactions on, Vol. 56, No. 2. (2008), pp. 530-541. by M. Bakri-Kassem, S. Fouladi, R. R. Mansour posted to cmos-mems mems varactor by z3phyr on 2009-01-13 19:22:49 as
	Charging in Dielectricless Capacitive RF-MEMS Switches [My Copy] Microwave Theory and Techniques, IEEE Transactions on In Microwave Theory and Techniques, IEEE Transactions on, Vol. 57, No. 1. (2009), pp. 231-236. by D. Mardivirin, A. Pothier, A. Crunteanu, B. Vialle, P. Blondy posted to dielectric-charging mems mems-switch rf-mems by z3phyr on 2009-01-13 16:47:52 as
	Low-voltage large-value tunable capacitors using selfaligned HARPSS [My Copy] Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on In Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on (2008), pp. 319-322. by M. Rais-Zadeh, A. K. Samarao, P. Monajemi, F. Ayazi posted to harpss mems varactor by z3phyr on 2008-11-19 02:21:43 as
	A novel linearly tunable butterfly-shape MEMS capacitor [My Copy] Microelectronics Journal, Vol. 39, No. 5. (May 2008), pp. 756-762. by M. Shavezipur, A. Khajepour, S. Hashemi posted to mems varactor by z3phyr on 2008-11-19 01:40:27 as
	Evaluation of contacts for a MEMS thermal switch [My Copy] Journal of Micromechanics and Microengineering, Vol. 18, No. 10. (2008), 105012. by J. Cho, C. Richards, D. Bahr, J. Jiao, R. Richards posted to liquid-metal mems thermal-contact by z3phyr on 2008-10-02 23:07:42 as
	Thermal Isolation of Encapsulated MEMS Resonators [My Copy] Microelectromechanical Systems, Journal of In Microelectromechanical Systems, Journal of, Vol. 17, No. 1. (2008), pp. 175-184. by C. M. Jha, M. A. Hopcroft, S. A. Chandorkar, et al.J. C. Salvia, M. Agarwal, R. N. Candler, R. Melamud, Bongsang Kim, T. W. Kenny posted to mems packaging by z3phyr on 2008-08-29 19:12:11 as along with 1 person wongmld
	On the Dynamic Response of Electrostatic MEMS Switches [My Copy] Microelectromechanical Systems, Journal of In Microelectromechanical Systems, Journal of, Vol. 17, No. 1. (2008), pp. 236-243. by V. Leus, D. Elata posted to dynamics electrostatic-actuation mems mems-switch by z3phyr on 2008-08-29 19:11:38 as
	MEMS Switched Tunable Inductors [My Copy] Microelectromechanical Systems, Journal of In Microelectromechanical Systems, Journal of, Vol. 17, No. 1. (2008), pp. 78-84. by M. Rais-Zadeh, P. A. Kohl, F. Ayazi posted to mems tunable-inductors by z3phyr on 2008-08-29 19:11:14 as
	Cryogenic Pull-Down Voltage of Microelectromechanical Switches [My Copy] Microelectromechanical Systems, Journal of In Microelectromechanical Systems, Journal of, Vol. 17, No. 2. (2008), pp. 351-355. by J. G. Noel, A. Bogozi, Y. A. Vlasov, G. L. Larkins posted to actuation cryogenic electrostatic mems pullin-voltage by z3phyr on 2008-08-29 19:02:49 as
	Micromachined RF-Coupled Cantilever Inverted-Microstrip Millimeter-Wave Filters [My Copy] Microelectromechanical Systems, Journal of In Microelectromechanical Systems, Journal of, Vol. 17, No. 3. (2008), pp. 767-776. by S. Lucyszyn, K. Miyaguchi, H. W. Jiang, et al.I. D. Robertson, G. Fisher, A. Lord, Joo-Young Choi posted to drie filter mems micromachining microstrip-filters by z3phyr on 2008-08-29 18:51:19 as
	Design, Modeling, and Demonstration of a MEMS Repulsive-Force Out-of-Plane Electrostatic Micro Actuator [My Copy] Microelectromechanical Systems, Journal of In Microelectromechanical Systems, Journal of, Vol. 17, No. 3. (2008), pp. 532-547. by Siyuan He, Ben posted to actuation conformal-mapping electrostatic fringing-field mems by z3phyr on 2008-08-29 03:16:42 as
	A novel external electrode configuration for the electrostatic actuation of MEMS based devices [My Copy] Journal of Micromechanics and Microengineering, Vol. 14, No. 4. (2004), pp. 446-451. by Michel A. Rosa, Dirk D. Bruyker, Armin R. Völkel, Eric Peeters, John Dunec posted to fringing-field mems by z3phyr on 2008-08-29 03:08:42 as
	An electrostatic fringing-field actuator (EFFA): application towards a low-complexity thin-film RF-MEMS technology [My Copy] Journal of Micromechanics and Microengineering, Vol. 17, No. 7. (2007), pp. S204-S210. by X. Rottenberg, S. Brebels, P. Ekkels, et al.P. Czarnecki, P. Nolmans, R. P. Mertens, B. Nauwelaers, R. Puers, De I. Wolf, De W. Raedt, H. A. C. Tilmans posted to actuation electrostatic fringing-field mems rf-mems by z3phyr on 2008-08-26 18:15:20 as
	Modelling the electrostatic actuation of MEMS: state of the art 2005 [My Copy] (September 2005) by Ramon C. Castelló, A. M. Shkel, Fargas A. Marquès posted to actuation dynamics electrostatic lagrangian mems modelling by z3phyr on 2008-08-26 18:11:02 as
	MEMS-Switchable Coupled Resonator Microwave Bandpass Filters [My Copy] Microwave Theory and Techniques, IEEE Transactions on In Microwave Theory and Techniques, IEEE Transactions on, Vol. 56, No. 7. (2008), pp. 1747-1755. by Cen Ong, M. Okoniewski posted to mems tunable-filters by z3phyr on 2008-08-26 16:56:43 as
	A low-temperature thin-film electroplated metal vacuum package [My Copy] Microelectromechanical Systems, Journal of In Microelectromechanical Systems, Journal of, Vol. 13, No. 2. (2004), pp. 147-157. by B. H. Stark, K. Najafi posted to hermetic mems packaging by z3phyr on 2008-08-21 01:25:13 as along with 1 person wongmld
	A Generic Environment-Resistant Packaging Technology for MEMS [My Copy] Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International In Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International (2007), pp. 335-338. by S. H. Lee, S. W. Lee, K. Najafi posted to mems packaging by z3phyr on 2008-08-20 21:43:26 as
	Photonic MEMS: From Laser Physics to Cell Biology [My Copy] Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International In Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International (2007), pp. 2485-2488. by A. Q. Liu, X. M. Zhang posted to mems omems review by z3phyr on 2008-08-20 19:55:55 as
	RF MEMS Sequentially Reconfigurable Sierpinski Antenna on a Flexible Organic Substrate With Novel DC-Biasing Technique [My Copy] Microelectromechanical Systems, Journal of In Microelectromechanical Systems, Journal of, Vol. 16, No. 5. (2007), pp. 1185-1192. by N. Kingsley, D. E. Anagnostou, M. Tentzeris, J. Papapolymerou posted to lcp mems reconfigurable-antenna rf-mems by z3phyr on 2008-08-20 05:48:26 as
	Two decades of MEMS -- from surprise to enterprise - [My Copy] Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on In Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on (2007), pp. 1-6. by H. Fujita posted to mems review by z3phyr on 2008-08-20 05:34:17 as
	Microelectromechanical Systems Tunable Frequency-Selective Surfaces and Electromagnetic-Bandgap Structures on Rigid-Flex Substrates [My Copy] Microwave Theory and Techniques, IEEE Transactions on In Microwave Theory and Techniques, IEEE Transactions on, Vol. 56, No. 7. (2008), pp. 1737-1746. by G. M. Coutts, R. R. Mansour, S. K. Chaudhuri posted to ebg fss mems by z3phyr on 2008-08-20 05:06:00 as
	Sub-Microsecond RF MEMS Switched Capacitors [My Copy] Microwave Theory and Techniques, IEEE Transactions on In Microwave Theory and Techniques, IEEE Transactions on, Vol. 55, No. 6. (2007), pp. 1314-1321. by B. Lacroix, A. Pothier, A. Crunteanu, et al.C. Cibert, F. Dumas-Bouchiat, C. Champeaux, A. Catherinot, P. Blondy posted to mems rf-mems switched-capacitor by z3phyr on 2008-08-20 04:45:07 as
	Hermeticity testing of capacitive RF MEMS switches [My Copy] Reliability Physics Symposium, 2008. IRPS 2008. IEEE International In Reliability Physics Symposium, 2008. IRPS 2008. IEEE International (2008), pp. 691-692. by P. J. van der Wel, J. Stulemeijer, J. A. Bielen, et al.F. G. A. Theunis, A. den Dekker, M. A. J. van Gils, R. J. Havens posted to hermetic mems packaging testing by z3phyr on 2008-08-20 04:13:58 as
	Reconfigurable MEMS Antennas [My Copy] Adaptive Hardware and Systems, 2008. AHS '08. NASA/ESA Conference on In Adaptive Hardware and Systems, 2008. AHS '08. NASA/ESA Conference on (2008), pp. 147-154. by Nakul Haridas, Ahmet T. Erdogan, Tughrul Arslan, et al.Anthony J. Walton, Stewart Smith, Tom Stevenson, Camelia Dunare, Alan Gundlach, Jon Terry, Petros Argyrakis, Kevin Tierney, Alan Ross, Tony O'Hara posted to mems reconfigurable-antenna review rf-mems by z3phyr on 2008-08-20 03:57:56 as
	Polymer-core conductor approaches for RF MEMS [My Copy] Journal of Microelectromechanical Systems, Vol. 14 (2005) by Yong K. Yoon, Jin W. Park, M. G. Allen posted to mems micromachining polymer rf-mems by z3phyr on 2008-08-20 03:12:56 as
	Using dynamic voltage drive in a parallel-plate electrostatic actuator for full-gap travel range and positioning [My Copy] Journal of Microelectromechanical Systems, Vol. 15, No. 1. (2006) by L. A. Rocha, E. Cretu, R. F. Wolffenbuttel posted to actuation dynamics electrostatic mems pullin-voltage by z3phyr on 2008-08-20 03:12:55 as
	A bulk-micromachined bistable relay with U-shaped thermal actuators [My Copy] Journal of Microelectromechanical Systems, Vol. 14 (2005) by Jin Qiu, J. H. Lang, A. H. Slocum, A. C. Weber posted to actuation electrothermal mems mems-switch by z3phyr on 2008-08-20 03:12:55 as
	The Casimir effect: a force from nothing [My Copy] (September 2002) by Physicsweb posted to casimir-effect mems nems by z3phyr on 2008-08-20 03:12:55 as
	Dynamic pull-in of parallel-plate and torsional electrostatic MEMS actuators [My Copy] Journal of Microelectromechanical Systems, Vol. 15, No. 4. (2006) by G. N. Nielson, G. Barbastathis posted to actuation dynamics electrostatic mems by z3phyr on 2008-08-20 03:12:55 as
	Deep-reactive ion-etched compliant starting zone electrostatic zipping actuators [My Copy] Journal of Microelectromechanical Systems, Vol. 14, No. 6. (2005) by Jian Li, M. P. Brenner, T. Christen, M. S. Kotilainen, J. H. Lang, A. H. Slocum posted to actuation electrostatic mems pullin-voltage by z3phyr on 2008-08-20 03:12:55 as
	A MEMS reconfigurable DGS resonator for K-band applications [My Copy] Journal of Microelectromechanical Systems, Vol. 15 (2006) by E. K. I. Hamad, A. M. E. Safwat, A. S. Omar posted to dgs mems mems-switch resonators rf-mems by z3phyr on 2008-08-20 03:12:52 as
	Simulation of Microelectromechanical Systems [My Copy] (1994) by Gary K. Fedder posted to modelling mems by z3phyr on 2008-08-20 03:12:52 as
	On the dynamic pull-in of electrostatic actuators with multiple degrees of freedom and multiple voltage sources [My Copy] Journal of Microelectromechanical Systems, Vol. 15 (2006) by D. Elata, H. Bamberger posted to actuation dynamics electrostatic mems pullin-voltage by z3phyr on 2008-08-20 03:12:52 as
	Stiction, adhesion energy, and the Casimir effect in micromechanical systems [My Copy] Physics Review B, Vol. 63, No. 033-402. (2001), pp. 1-4. by E. Buks, Ml posted to casimir-effect mems nems by z3phyr on 2008-08-20 03:12:51 as
	A Monolithic Phased Array Using 3-bit Distributed RF MEMS Phase Shifters [My Copy] Microwave Theory and Techniques, IEEE Transactions on In Microwave Theory and Techniques, IEEE Transactions on, Vol. 56, No. 2. (2008), pp. 270-277. by K. Topalli, O. A. Civi, S. Demir, S. Koc, T. Akin posted to easa mems phaseshifter by z3phyr on 2008-08-19 07:08:11 as
	High-Reliability Miniature RF-MEMS Switched Capacitors [My Copy] Microwave Theory and Techniques, IEEE Transactions on In Microwave Theory and Techniques, IEEE Transactions on, Vol. 56, No. 4. (2008), pp. 971-981. by B. Lakshminarayanan, D. Mercier, G. M. Rebeiz posted to mems rf-mems switched-capacitor by z3phyr on 2008-08-19 07:03:49 as
	Fabrication and Characterization of a Wafer-Level MEMS Vacuum Package With Vertical Feedthroughs [My Copy] Microelectromechanical Systems, Journal of In Microelectromechanical Systems, Journal of, Vol. 17, No. 1. (2008), pp. 193-200. by Junseok Chae, J. M. Giachino, K. Najafi posted to mems packaging by z3phyr on 2008-08-19 06:51:31 as
	Full-Lagrangian schemes for dynamic analysis of electrostatic MEMS [My Copy] Microelectromechanical Systems, Journal of In Microelectromechanical Systems, Journal of, Vol. 13, No. 5. (2004), pp. 737-758. by S. K. De, N. R. Aluru posted to lagrangian mems by z3phyr on 2008-08-19 06:38:27 as

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mems	47
rf-mems	30
rfic	17
varactor	16
review	14
695	13
doherty	13
power-amplifier	13
micromachining	12
actuation	11
drie	11
electrostatic	10
mems-switch	9
cmos	8
dynamics	8
packaging	8
rie	7
cpw	6
filter	6
microstrip-filters	6
modelling	6
nems	6
pullin-voltage	6
tunable-filters	6
antenna	5
filter-synthesis	5
fringing-field	5
micrograss	5
piezoelectric-actuation	5
surface-roughness	5
van-der-waals	5
wet-etching	5
polymer	4
reconfigurable-antenna	4
casimir-effect	3
cmos-mems	3
conformal-mapping	3
dielectric	3
dual-band	3
measurement	3
mems-market	3
micromechanical-resonator	3
parylene	3
transmission-line	3
bonding	2
capacitance-measurement	2
capacitive-switch	2
cavity-fitlers	2
cnt	2
cryogenic	2
electrostatic-actuation	2
evanescent-mode-resonator	2
filters	2
hermetic	2
lagrangian	2
lcp	2
liquid-metal	2
metal-contact	2
microfabrication	2
microfluidics	2
micromechanical-filter	2
phased-arrays	2
phaseshifter	2
power-divider	2
recipe	2
reliability	2
switched-capacitor	2
system-design	2
3d-interconnect	1
absorptive-switch	1
antistick-passivation	1
cellular-automata	1
cognitive-radio	1
constant-bandwidth	1
coupling-matrix	1
cpw-microstrip	1
creep	1
dc-switch	1
dgs	1
dielectric-charging	1
dual-mode-waveguide-filter	1
easa	1
ebg	1
efab	1
electromagnetics	1
electrothermal	1
electrowetting	1
fss	1
gyroscope	1
harpss	1
information-theory	1
infrared-sensor	1
klystron	1
koh	1
lab-on-chip	1
lateral-contact	1
lincoln-lab-switch	1
linearity	1
linearization	1
liquid-crystal	1
ltcc	1
materials	1
mement-method	1
mems-test	1
memtronic-switch	1
metamaterials	1
micro-assembly	1
micropumps	1
neural-network	1
nonlinear	1
omems	1
piezoresistive	1
plasma	1
pyrex	1
residual-stress	1
resonators	1
rf-transition	1
roughness	1
schwartz-christoffer	1
si-ge	1
snap-through	1
software-defined-radio	1
soi-mems	1
spiral-antenna	1
spurious-mode	1
stepped-impedance-resonators	1
strain-sensor	1
surface	1
surface-micromachining	1
surface-modification	1
teflon	1
temperature-stability	1
terahertz	1
testing	1
thermal-compression	1
thermal-contact	1
thermosonic	1
transition	1
tunable-inductors	1
tunable-resonator	1
uwb	1
vacuum-science	1
varactor-tunable	1
waveguide	1
wireless-communication	1

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